4H-N / 6H-N SiC Wafer Yongeye gushakisha umusaruro Dummy urwego Dia150mm Silicon karbide substrate

Ibisobanuro bigufi:

Turashobora gutanga ubushyuhe bwo hejuru burenze urugero bwa firime yoroheje, firime ya magnetiki yoroheje hamwe na ferroelectric thin film substrate, semiconductor kristal, optique kristal, ibikoresho bya laser kristal, icyarimwe bitanga icyerekezo, gukata kristu, gusya, gusya hamwe nizindi serivisi zitunganya.Ibicuruzwa byacu bya SiC biva mu ruganda rwa Tankeblue mu Bushinwa.


Ibicuruzwa birambuye

Ibicuruzwa

Uburebure bwa santimetero 6 silicon karbide (SiC) substrate ibisobanuro

Icyiciro

Zeru MPD

Umusaruro

Icyiciro cy'ubushakashatsi

Dummy Grade

Diameter

150.0mm ± 0,25mm

Umubyimba

4H-N

350um ± 25um

4H-SI

500um ± 25um

Icyerekezo cya Wafer

Ku murongo: <0001> ± 0.5 ° kuri 4H-SI
Off axis: 4.0 ° yerekeza kuri <1120> ± 0.5 ° kuri 4H-N

Inzu y'ibanze

{10-10} ± 5.0 °

Uburebure bwibanze

47.5mm ± 2.5mm

Kwirengagiza impande

3mm

TTV / Umuheto / Intambara

≤15um / ≤40um / ≤60um

Ubucucike bwa Micropipe

≤1cm-2

≤5cm-2

≤15cm-2

≤50cm-2

Kurwanya 4H-N 4H-SI

0.015 ~ 0.028Ω! Cm

≥1E5Ω! Cm

Ubugome

Igipolonye Ra ≤1nm CMP Ra≤0.5nm

#Ibice byumucyo mwinshi

Nta na kimwe

1 byemewe, ≤2mm

Uburebure bwuzuye ≤10mm, uburebure bumwe≤2mm

* Isahani ya hex n'umucyo mwinshi

Agace kegeranye ≤1%

Agace kegeranye ≤ 2%

Agace kegeranye ≤ 5%

* Agace ka polytype ukoresheje urumuri rwinshi

Nta na kimwe

Agace kegeranye ≤ 2%

Agace kegeranye ≤ 5%

* & Igishushanyo ukoresheje urumuri rwinshi

Igishushanyo 3 kuri 1 x wafer diameter cumulative uburebure

Igishushanyo 5 kuri 1 x wafer diameter cumulative uburebure

5ibishushanyo kuri 1 x wafer diameter cumulative uburebure

Chip

Nta na kimwe

3 byemewe, ≤0.5mm buri umwe

5 biremewe, mm1mm buri umwe

Kwanduzwa n'umucyo mwinshi

Nta na kimwe

Igurisha & Serivisi zabakiriya

Kugura ibikoresho

Ishami rishinzwe kugura ibikoresho rishinzwe gukusanya ibikoresho byose bikenewe kugirango ubyare umusaruro.Gukurikirana neza ibicuruzwa nibikoresho byose, harimo imiti nubushakashatsi bwumubiri burahari.

Ubwiza

Mugihe na nyuma yo gukora cyangwa gutunganya ibicuruzwa byawe, ishami rishinzwe kugenzura ubuziranenge rifite uruhare mukureba neza ko ibikoresho byose hamwe n’ubworoherane byujuje cyangwa birenze ibyo wasobanuye.

Serivisi

Turishimye kuba dufite abakozi bashinzwe kugurisha bafite uburambe bwimyaka irenga 5 munganda za semiconductor.Baratojwe gusubiza ibibazo bya tekiniki kimwe no gutanga amagambo yatanzwe mugihe ukeneye.

turi iruhande rwawe igihe icyo aricyo cyose mugihe ufite ikibazo, ukagikemura mumasaha 10.

Igishushanyo kirambuye

Silicon karbide substrate (1)
Silicon karbide substrate (2)

  • Mbere:
  • Ibikurikira:

  • Andika ubutumwa bwawe hano hanyuma utwohereze