LT Litiyumu Tantalate (LiTaO3) Crystal 2inch / 3inch / 4inch / 6 寸 inch Orientaiton Y-42 ° / 36 ° / 108 ° Ubunini 250-500um

LT Lithium Tantalate (LiTaO3) Crystal 2inch / 3inch / 4inch / 6 寸 inch Orientaiton Y-42 ° / 36 ° / 108 ° Ubunini 250-500um Ishusho Yerekanwe

Ibisobanuro bigufi:

WaTers ya LiTaO₃ yerekana sisitemu ikomeye ya piezoelectric na ferroelectric sisitemu, yerekana coefficient zidasanzwe za piezoelectric, ituze ryumuriro, hamwe nibikoresho bya optique, bigatuma iba ntangarugero kubutaka bwa acoustic wave (SAW) muyunguruzi, ubwinshi bwa acoustic wave (BAW) resonator, modulator optique, hamwe na disiketi ya infragre. X.

X. Ibikoresho bya dielectric bihoraho (ε ~ 40-50), coefficient piezoelectric (d₃₃ ~ 8-10 pC / N), hamwe nubushyuhe bwa Curie (~ 600 ° C) bishyiraho LiTaO₃ nkibisobanuro byatoranijwe kumashanyarazi menshi kandi akayungurura neza.

Ibikorwa byacu bihujwe bikubiyemo iterambere rya kirisitu, wafering, polishing, hamwe na firime yoroheje, hamwe nubushobozi bwo gukora buri kwezi burenga waferi 3.000 kugirango dukoreshe itumanaho rya 5G, ibikoresho bya elegitoroniki, fotonike, ninganda zokwirwanaho. Dutanga inama zuzuye za tekiniki, icyitegererezo kiranga, hamwe na serivise ntoya ya prototyping kugirango dutange ibisubizo byiza bya LiTaO₃.

Ohereza imeri kuri twe

Ibiranga

Ibipimo bya tekiniki

Izina	Urwego rwiza-LiTaO3	Urutonde rwamajwi LiTaO3
Axial	Z gukata + / - 0.2 °	36 ° Y gukata / 42 ° Y gukata / X gukata(+ / - 0.2 °)
Diameter	76.2mm + / - 0.3mm /100 ± 0.2mm	76.2mm + /-0.3mm100mm + /-0.3mm 0r 150 ± 0.5mm
Indege ya Datum	22mm + / - 2mm	22mm + / -2mm32mm + / -2mm
Umubyimba	500um + / -5mm1000um + / -5mm	500um + / -20mm350um + / -20mm
TTV	≤ 10um	≤ 10um
Ubushyuhe bwa Curie	605 ° C + / - 0,7 ° C (DTAmethod)	605 ° C + / -3 ° C (DTAmethod
Ubwiza bwubuso	Kuringaniza impande ebyiri	Kuringaniza impande ebyiri
Impande	kuzenguruka	kuzenguruka

Ibintu by'ingenzi biranga

1.Imiterere ya kristu n'imikorere y'amashanyarazi

· Crystallographic Stabilite: 100% 4H-SiC polytype yiganje, zeru zeru nyinshi (urugero, 6H / 15R), hamwe na XRD itigisa umurongo wuzuye ubugari kuri kimwe cya kabiri ntarengwa (FWHM) ≤32.7 arcsec.
· Umuvuduko mwinshi wa Carrier: Imashini ya elegitoronike ya cm 5.400 / V · s (4H-SiC) hamwe nu mwobo wa cm 380 cm / V · s, ituma ibishushanyo mbonera byihuta.
· Gukomera kw'imirasire: Ihanganira imirasire ya 1 ya MeV ya neutron hamwe no kwangirika kwimuka ya 1 × 10¹⁵ n / cm², nibyiza mu kirere no mu kirere.

2.Ubushyuhe nubukanishi

· Ubushuhe budasanzwe bwubushyuhe: 4.9 W / cm · K (4H-SiC), inshuro eshatu za silikoni, ibikorwa bifasha hejuru ya 200 ° C.
· Coefficient yo Kwagura Ubushyuhe Buke: CTE ya 4.0 × 10⁻⁶ / K (25-1000 ° C), igahuza neza nububiko bushingiye kuri silikoni no kugabanya imihangayiko yubushyuhe.

3.Gusuzuma neza no gutunganya neza
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· Ubucucike bwa Micropipe: <0,3 cm⁻² (waferi ya santimetero 8), ubucucike bwa dislokisiyo <1000 cm⁻² (byagenzuwe hakoreshejwe KOH).
· Ubwiza bwubuso: CMP isizwe na Ra <0.2 nm, yujuje ibyangombwa bya EUV lithographie-ibyangombwa bisabwa.

Ibyingenzi

Indanganturo	Gusaba	Ibyiza bya tekiniki
Itumanaho ryiza	Lazeri 100G / 400G, moderi ya silicon Photonics	InP imbuto yimbuto ituma bandgap itaziguye (1.34 eV) hamwe na Si-ishingiye kuri heteroepitaxy, bigabanya igihombo cyo guhuza optique.
Imodoka nshya	800V ihinduranya ingufu za inverteri, charger zo mu bwato (OBC)	4H-SiC substrates ihangane> 1,200 V, igabanya igihombo cyogutwara 50% nubunini bwa sisitemu 40%.
5G Itumanaho	Ibikoresho bya milimetero-RF RF (PA / LNA), ibyuma byongera ingufu za sitasiyo	Semi-insuline ya SiC substrates (résistivivite> 10⁵ Ω · cm) ituma imirongo myinshi (60 GHz +) ihuza pasiporo.
Ibikoresho byo mu nganda	Ibyuma byubushyuhe bwo hejuru, impinduka zubu, monitor ya reaction ya nucleaire	InSb imbuto yimbuto (0.17 eV bandgap) itanga sensitivite igera kuri 300% @ 10 T.

LiTaO₃ Wafers - Ibiranga Ibyingenzi

1. Imikorere isumba izindi ya Piezoelectric

· Coefficient nyinshi ya piezoelectric (d₃₃ ~ 8-10 pC / N, K² ~ 0.5%) ituma ibikoresho bya SAW / BAW byihuta cyane hamwe nigihombo cyo gushiramo <1.5dB kuri 5G RF muyunguruzi

· Guhuza amashanyarazi meza cyane bifasha mugari-mugari (≥5%) gushungura ibishushanyo bya sub-6GHz na mmWave

2. Ibyiza byiza

· Umuyoboro mugari (> 70% woherejwe kuva 400-5000nm) kuri moderi ya electro-optique igera kuri> 40GHz

· Gukomera gukomeye kutari kumurongo (χ⁽²⁾ ~ 30pm / V) byorohereza igisekuru cya kabiri cyiza (SHG) muri sisitemu ya laser

3. Ihungabana ry’ibidukikije

· Ubushyuhe bwo hejuru bwa Curie (600 ° C) bugumana igisubizo cya piezoelectric murwego rwibinyabiziga (-40 ° C kugeza 150 ° C)

· Imiti idahwitse irwanya acide / alkalies (pH1-13) itanga ubwizerwe mubikorwa bya sensor inganda

4. Ubushobozi bwo kwihindura

· Icyerekezo cyerekezo: X-gukata (51 °), Y-gukata (0 °), Z-gukata (36 °) kubisubizo bya piezoelectric ibisubizo

· Amahitamo ya Doping: Mg-ikoporora (irwanya ibyangiritse optique), Zn-yuzuye (yongerewe d₃₃)

· Ubuso burangije: Epitaxial-yiteguye gusya (Ra <0.5nm), ITO / Au metallisation

LiTaO₃ Wafers - Porogaramu Yibanze

1. RF Imbere-Impera

· 5G NR SAW muyunguruzi (Band n77 / n79) hamwe na coefficient yubushyuhe bwinshyi (TCF) <| -15ppm / ° C |

· Ultra-Broadband BAW resonator ya WiFi 6E / 7 (5.925-7.125GHz)

2. Amafoto Yuzuye

· Umuvuduko mwinshi Mach-Zehnder modulator (> 100Gbps) kugirango itumanaho rihuze

· QWIP ya infragre ya disiketi hamwe nuburebure bwumurongo ushobora kuva kuri 3-14 mm

3. Ibikoresho bya elegitoroniki

· Ibikoresho bya parikingi ya Ultrasonic hamwe na> 200kHz inshuro zikora

· Transducers ya TPMS piezoelectric irokoka -40 ° C kugeza 125 ° C gusiganwa ku magare

4. Uburyo bwo kwirwanaho

· EW yakira muyunguruzi hamwe na> 60dB hanze yo kwangwa

· Abashaka misile IR windows itanga imirasire ya 3-5μm MWIR

5. Ikoranabuhanga rishya

· Optomechanical kwant transducers ya microwave-kuri-optique ihinduka

· PMUT yerekana amashusho yubuvuzi bwa ultrasound (> 20MHz)

LiTaO₃ Wafers - Serivisi za XKH

1. Gutanga imiyoborere

· Boule-to-wafer gutunganya hamwe nibyumweru 4 byo kuyobora igihe gisanzwe

· Ibiciro-byongerewe umusaruro bitanga 10-15% inyungu yibiciro hamwe nabanywanyi

2. Ibisubizo byihariye

· Icyerekezo cyihariye cya wafering: 36 ° ± 0.5 ° Y-gukata kugirango SAW ikore neza

· Ibice byanditse: MgO (5mol%) doping ya optique ya optique

Serivise zicyuma: Cr / Au (100 / 1000Å) ishusho ya electrode

3. Inkunga ya tekiniki

· Ibiranga ibikoresho: XRD itigisa umurongo (FWHM <0.01 °), isesengura rya AFM

· Kwigana ibikoresho: Icyitegererezo cya FEM kubushakashatsi bwa SAW

Umwanzuro

WaTers ya LiTaO₃ ikomeje gufasha iterambere ryikoranabuhanga mu itumanaho rya RF, gufotora hamwe, hamwe n’ibidukikije bikabije. Ubuhanga bwibikoresho bya XKH, gukora neza, hamwe nubufasha bwa tekinoroji bifasha abakiriya gutsinda ibibazo byubushakashatsi muri sisitemu ya elegitoroniki izakurikiraho.